Special coating
Coating is an essential process to stabilize process conditions and extend lifetime through special coating treatment on the surface of equipment parts.
By providing a wide range of various coating technologies optimized for each customer's process, particles and surface damage can be controlled and by stabilizing the conditions of the chamber, the life time of the product, the production yield and the operation rate can be improved, also contributing to the cost reduction of the customer.
Types of coating technology
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Anodized
coatingAnodized coating
Technology for forming a solid aluminum oxide film (Al2O3) on the surface of aluminum through electrochemical reaction between aluminum (Al) and oxygen (O)
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Thermal Spray
CoatingThermal Spray Coating
Technology of melting a coating material through heat and spraying it on the surface of parts to form a coating film
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The material to coat is instantaneously melted and sprayed using a high-temperature plasma under atmospheric conditions to form a coating film on the surface of products
Generally suitable for ceramic powder coating
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Technology to instantly melt and spray the coating materials with low melting point by using electric discharge in order to form the film on the surface of products
Suitable for metal coatings with low melting point
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Aerosol
depositionAerosol deposition
Technology of forming a high-density coating film without pores by colliding fine powders of ㎚ to ㎛ size to the surface of products under vacuum at very high speed without any melting process
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Physical
Vapor DepositionPhysical Vapor Deposition
PVD Coating is a technology that vaporizes materials such as coatings into a physical method (evaporation, sputtering) during a vacuum to form a dense coating on the surface of the product.
